合金靶材

MaterialsPurityMaximum DimensionPreparation
Al-Cu4N~5N1000×300mmsmelting
Al-Ti4N1000×300mmsmelting
Al-Mg4N1000×300mmsmelting
Ag-Cu4N1000×300mmsmelting
Co-Cr3N400×300mmsmelting
Co-Ni3N400×300mmsmelting
Co-Fe3N400×300mmsmelting
Co-Fe-B3N400×300mmsintering
Co-Fe-Cu3N400×300mmsmelting
Cr-Si3N400×300mmsintering
Cu-Mn3N~3N5Dia4”sintering
Cu-Mn3N~3N5400×300mmsmelting
Cu-Al3N~4N400×300mmsmelting
Fe-Mn2N5400×300mmsmelting
Fe-Ni2N5~3N5400×300mmsmelting
FeCoBSi2N5Dia4”sintering