陶瓷基板

Ceramic Substrates

氧化鋁 – Alumina Substrates (Al₂O₃)、
氧化鋯 – Zirconia Toughened Alumina Substrates (Al₂O₃/ZrO₂)、
氮化鋁 – Aluminum Nitride (AlN) Substrates、
氮化矽 – Silicon Nitride (Si₃N₄)

Condition	Unit	Al2O3		Al2O3/ZrO2	AlN	Si3N4	AlN	Si3N4
Material		–	–	96%	96.5%	Al2O3/ZrO2	AlN	Si3N4
Color		–	–	White	White	White	Gray	Gray
Bulk density		–	g/㎤	3.75	3.75	4.00	3.30	3.22
Surface roughness Ra		–	µm	0.4	0.3	0.2	0.2	0.4
Reflectivity		0.3-0.4mmt	%	70	70	80	35	–
		0.8-1.0mmt		80	80	90	25	–
Mechanical	Bending strength	3-point method	MPa	400	500	700	450	800
	Modulus of elasticity	–	GPa	330	330	310	320	310
	Vickers hardness	–	GPa	14	14	15	11	15
	Fracture toughness	IF method	MPa･√m	3.0	–	3.5	3.0	6.5
Thermal	Coefficient of thermal expansion	40-400°C	10-6/K	6.7	6.7	7.1	4.6	2.6
		40-800°C		7.8	7.8	8.0	5.2	3.1
	Thermal conductivity	25°C	W/(m･K)	24	24	27	180	85
		300°C		12	12	16	120	–
	Specific heat	25°C	J/(㎏･K)	750	750	720	720	680
Electrical	Dielectric constant	1MHz	–	9.8	9.8	10.2	8.5	7.8
	Dielectric loss factor	1MHz	10-3	0.2	0.2	0.2	0.3	0.4
	Volume resistivity	25°C	Ω･㎝	>1014	>1014	>1014	>1014	>1014
	Breakdown strength	DC	㎸/㎜	>15	>15	>15	>15	>15