金屬靶材

Materials	Purity	Maximum Dimension	Preparation
Al	3~5N	1000×300mm	smelting
Ag	4N	1000×300mm	smelting
Au	4N	800×300mm	smelting
Bi	4N	400×200mm	smelting
C(graphite)	3N	600×300mm	sintering
Co	3N	800×300mm	smelting
Cr	2N5~3N5	500×200mm	sintering
Cu	3N7	1000×300mm	smelting
Fe	2N5,3N,4N	1000×300mm	smelting
Ge	4N	Dia 4” (Φ)	sintering
Hf	3N	500×200mm	smelting
In	4N	800×300mm	smelting
Mg	3N5	500×300mm	smelting
Mo	3N5	500×300mm	sintering
Ni	2N5,3N5,4N5	1000×300mm	smelting
Pb	3N,4N	800×300mm	smelting
Pd	3N	500×300mm	smelting
Si	5N	Dia 4” (Φ)	sintering
Sn	3N5,5N	1000×300mm	smelting
Ta	3N5	1000×300mm	smelting
Ti	2N5,3N	1000×300mm	smelting
V	2N5,3N	1000×300mm	smelting
W	3N5	1000×300mm	smelting
Zn	3N,4N	800×300mm	smelting
Zr	3N	800×300mm	smelting
…	…	…	…